Room Ionization System

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DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator
DS827R Laminar Flow Area Static Eliminator

DS827R Laminar Flow Area Static Eliminator

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Tronovo DS827R Steady-State DC In-tool Ionizer is designed for laminar flow clean environments in high-end manufacturing industries such as semiconductors and panels. It employs innovative Single-crystal Silicon ion needles and steady-state DC ionization technology, which not only efficiently and continuously eliminates static, but also fundamentally eliminates particulate pollution generated by the ion needles.The unique quadrupole ion needle design enables effective ionization at close range (approximately 7.6 cm). The ion generator features a compact structure and support 24VDC power supply. It can be easily integrated into the tight space inside equipment, directly addressing electrostatic particle adsorption and discharge damage, and ensuring process cleanliness and product yield.
Performance
❯ Compact size, easy integration into various devices
❯ Quadrupole ion needle design
❯ Single-crystal Silicon ion needles, Reduce particulate pollutants at source
❯ 24VDC power supply, real-time Fault Diagnosis and Alarm
❯ Steady-state DC technology provides continuous and balanced positive and negative ion output
❯ Designed for a laminar flow environment in cleanrooms, it does not affect airflow organization or cleanliness
❯ Steady-state DC technology, Safeguarding high-end manufacturing
Key Features
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Product Parameter

Product Details

drawing board 1

Compact structure, install in tight space

Featuring a highly compact design, significantly reduce the space occupied, making it easy to integrate into the limited spaces of various process equipment. Its compact size not only install in existing production lines but also allows for flexible layouts in new production lines, helping customers maximize the deployment of static control functions within limited spaces, optimize the overall equipment configuration.

Single-crystal Silicon, decrease particle contamination

Traditional ion needles are prone to produce microparticles during discharge, becoming pollution sources in clean environments. This product uses high-purity single-crystal silicon ion needles with stable structure. The particles are hardly detached in the high pressure ionized air for a long time, reduce the risk of contamination at the source. This In-tool Ionizer is particularly suitable for industries with extremely high cleanliness requirements, such as semiconductors, optoelectronic displays, and biomedicine,effectively protect critical process products such as wafers and optical components from contamination, improving product yield and reliability.

drawing board 2
画板 9

24VDC power supply, real-time monitoring

The In-tool Ionizer supports real-time monitoring its operating status. It provides local status visualization through intuitive indicator lights and enables remote data transmission and feedback via a communication interface. Upon detecting abnormal operating conditions, the In-tool Ionizer automatically triggers an warning mechanism, helping maintenance personnel accurately pinpoint the root cause of the fault and effectively mitigating the risks of batch product defects and unplanned production line downtime caused by static eliminate failure.

Fully automated control compatible with industrial protocols

The In-tool Ionizer is equipped with RS485 industrial communication interface or PLC interface, allowing easy integration into existing factory control systems for remote start/stop, parameter adjustment, and centralized monitoring. Users can adjust parameters in real time to meet the static control needs of different process stages.This feature facilitates the construction of intelligent production lines, enabling equipment linkage and closed-loop management of production data, improving overall manufacturing efficiency and process consistency.

drawing board 4
drawing board 5

ESD solution for wafer loading and transport systems

At the critical moment when wafers are transferred from robotic arms to precision equipment, static electricity can attract deadly particles and cause ESD damage.Tronovo DS827R In-tool Ionizer installed at the loading port, forms an ion curtain that neutralizes the surface static of the wafer to an extremely low level within milliseconds. This eliminates the risk of particulate contamination and electrostatic discharge at the source, directly safeguarding the core yield of the front-end processes.

Electrostatic Elimination Solution for chip sorting and mounting

During chip picking and placement, static electricity may cause picking failure, positional misalignment, and ESD damage. Tronovo DS827R In-tool Ionizer is integrated above the pick-and-place station of the placement machine, precisely neutralizing the static electricity before and after the nozzle contacts the chip. This ensures that the tiny chips are reliably and stably transferred and positioned, significantly improving packaging efficiency and chip reliability.

drawing board 6

Compact structure, install in tight space

Featuring a highly compact design, significantly reduce the space occupied, making it easy to integrate into the limited spaces of various process equipment. Its compact size not only install in existing production lines but also allows for flexible layouts in new production lines, helping customers maximize the deployment of static control functions within limited spaces, optimize the overall equipment configuration.

drawing board 1.png

Single-crystal Silicon, decrease particle contamination

Traditional ion needles are prone to produce microparticles during discharge, becoming pollution sources in clean environments. This product uses high-purity single-crystal silicon ion needles with stable structure. The particles are hardly detached in the high pressure ionized air for a long time, reduce the risk of contamination at the source. This In-tool Ionizer is particularly suitable for industries with extremely high cleanliness requirements, such as semiconductors, optoelectronic displays, and biomedicine, effectively protect critical process products such as wafers and optical components from contamination, improving product yield and reliability.

drawing board 2.png

24VDC power supply, real-time monitoring

The In-tool Ionizer supports real-time monitoring its operating status. It provides local status visualization through intuitive indicator lights and enables remote data transmission and feedback via a communication interface. Upon detecting abnormal operating conditions, the In-tool Ionizer automatically triggers an warning mechanism, helping maintenance personnel accurately pinpoint the root cause of the fault and effectively mitigating the risks of batch product defects and unplanned production line downtime caused by static eliminate failure.

画板 9.png

Fully automated control compatible with industrial protocols

The In-tool Ionizer is equipped with RS485 industrial communication interface or PLC interface, allowing easy integration into existing factory control systems for remote start/stop, parameter adjustment, and centralized monitoring. Users can adjust parameters in real time to meet the static control needs of different process stages. This feature facilitates the construction of intelligent production lines, enabling equipment linkage and closed-loop management of production data, improving overall manufacturing efficiency and process consistency.

drawing board 4.png

ESD solution for wafer loading and transport systems

At the critical moment when wafers are transferred from robotic arms to precision equipment, static electricity can attract deadly particles and cause ESD damage.Tronovo DS827R In-tool Ionizer installed at the loading port, forms an ion curtain that neutralizes the surface static of the wafer to an extremely low level within milliseconds.This eliminates the risk of particulate contamination and electrostatic discharge at the source, directly safeguarding the core yield of the front-end processes.

drawing board 5.png

Electrostatic Elimination Solution for chip sorting and mounting

During chip picking and placement, static electricity may cause picking failure, positional misalignment, and ESD damage. Tronovo DS827R In-tool Ionizer is integrated above the pick-and-place station of the placement machine, precisely neutralizing the static electricity before and after the nozzle contacts the chip. This ensures that the tiny chips are reliably and stably transferred and positioned, significantly improving packaging efficiency and chip reliability.

drawing board 6.png

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